Assignee

LIU XINYE

US·2 granted patents·332 citations·filing 2007–2012

Technology mixC23F2 H10P2 H10W2 H01L1

Top patents by PatentIndex Score

2 records

0196US8187486B1Modulating etch selectivity and etch rate of silicon nitride thin filmsLIU XINYE·Filed 2007·Granted May 29, 2012·308 cites·26 claims
0293US8617348B1Modulating etch selectivity and etch rate of silicon nitride thin filmsLIU XINYE·Filed 2012·Granted Dec 31, 2013·24 cites·20 claims

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