Assignee
LOERING ULRICH
DE·4 granted patents·9 citations·filing 2010–2012
Top patents by PatentIndex Score
4 records- 0182US8879159B2Lithography projection objective, and a method for correcting image defects of the sameLOERING ULRICH·Filed 2011·Granted Nov 4, 2014·2 cites·64 claims
- 0278US8228483B2Projection objective for microlithography, projection exposure apparatus, projection exposure method and optical correction plateLOERING ULRICH·Filed 2010·Granted Jul 24, 2012·6 cites·20 claims
- 0362US8339576B2Projection objective of a microlithographic projection exposure apparatusLOERING ULRICH·Filed 2012·Granted Dec 25, 2012·1 cites·20 claims
- 0447US9201226B2Imaging opticsLOERING ULRICH·Filed 2012·Granted Dec 1, 2015·0 cites·20 claims
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