Assignee
LOOPSTRA ERIK ROELOF
NL·19 granted patents·2 pending applications·49 citations·filing 2004–2012
Top patents by PatentIndex Score
21 records- 0192US8208124B2Lithographic apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2006·Granted Jun 26, 2012·9 cites·21 claims
- 0285US8300208B2Lithographic apparatus and a method to compensate for the effect of disturbances on the projection system of a lithographic apparatusLOOPSTRA ERIK ROELOF·Filed 2009·Granted Oct 30, 2012·8 cites·15 claims
- 0379US9110377B2Lithographic apparatus, EUV radiation generation apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2011·Granted Aug 18, 2015·5 cites·15 claims
- 0479US8547525B2EUV radiation generation apparatusLOOPSTRA ERIK ROELOF·Filed 2010·Granted Oct 1, 2013·5 cites·19 claims
- 0576US8174671B2Lithographic projection apparatus and method for controlling a support structureLOOPSTRA ERIK ROELOF·Filed 2008·Granted May 8, 2012·4 cites·38 claims
- 0669US9164401B2Projection system and lithographic apparatusLOOPSTRA ERIK ROELOF·Filed 2009·Granted Oct 20, 2015·2 cites·23 claims
- 0768US8917380B2Lithographic apparatus and methodLOOPSTRA ERIK ROELOF·Filed 2012·Granted Dec 23, 2014·1 cites·13 claims
- 0866US8866111B2Radiation source and method for lithographic apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2012·Granted Oct 21, 2014·2 cites·18 claims
- 0963US8208123B2Lithographic apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2004·Granted Jun 26, 2012·6 cites·40 claims
- 1058US8804097B2Lithographic apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2011·Granted Aug 12, 2014·0 cites·20 claims
- 1157US8289498B2Lithographic apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2009·Granted Oct 16, 2012·1 cites·8 claims
- 1256US8431916B2Radiation source and lithographic apparatusLOOPSTRA ERIK ROELOF·Filed 2009·Granted Apr 30, 2013·3 cites·19 claims
- 1350US8278636B2Radiation sources and methods of generating radiationLOOPSTRA ERIK ROELOF·Filed 2009·Granted Oct 2, 2012·2 cites·22 claims
- 1449US8537330B2Lithographic apparatus, device manufacturing method and computer readable mediumLOOPSTRA ERIK ROELOF·Filed 2011·Granted Sep 17, 2013·0 cites·18 claims
- 1546US9414477B2Radiation source, lithographic apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2009·Granted Aug 9, 2016·1 cites·16 claims
- 1644US8462826B2Laser deviceLOOPSTRA ERIK ROELOF·Filed 2010·Granted Jun 11, 2013·0 cites·11 claims
- 1743US9134629B2Illumination system, lithographic apparatus and method of forming an illumination modeLOOPSTRA ERIK ROELOF·Filed 2010·Granted Sep 15, 2015·0 cites·24 claims
- 1843US8264670B2Lithographic apparatus and device manufacturing method for clamping a patterning deviceLOOPSTRA ERIK ROELOF·Filed 2006·Granted Sep 11, 2012·0 cites·31 claims
- 1940US9091944B2Source collector, lithographic apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2010·Granted Jul 28, 2015·0 cites·18 claims
- 2038US2012026480A1Image-Compensating Addressable Electrostatic Chuck SystemLOOPSTRA ERIK ROELOF·Filed 2011·Application pending·0 cites
- 2135US2012280148A1Euv radiation source and lithographic apparatusLOOPSTRA ERIK ROELOF·Filed 2010·Application pending·0 cites
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