Assignee
LOTUS APPLIED TECH LLC
US·1 granted patent·4 pending applications·0 citations·filing 2019–2025
Top patents by PatentIndex Score
5 records- 0164US2025361606A1Metal-fluoride thin films and deposition methodsLOTUS APPLIED TECH LLC·Filed 2025·Application pending·0 cites
- 0259US2024368759A1Methods and systems for selective atomic layer depositionLOTUS APPLIED TECH LLC·Filed 2023·Application pending·0 cites
- 0353US2024368760A1Methods and systems for inhibiting precursor interactions during radical-enhanced atomic layer depositionLOTUS APPLIED TECH LLC·Filed 2023·Application pending·0 cites
- 0450US2020017970A1Water-insensitive methods of forming metal oxide films and products related theretoLOTUS APPLIED TECH LLC·Filed 2019·Application pending·0 cites
- 0549US11935759B2High voltage, low pressure plasma enhanced atomic layer depositionLOTUS APPLIED TECH LLC·Filed 2020·Granted Mar 19, 2024·0 cites·21 claims
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