Assignee
LU CHI-TA
TW·3 granted patents·4 citations·filing 2010–2012
Top patents by PatentIndex Score
3 records- 0177US8458631B2Cycle time reduction in data preparationLU CHI-TA·Filed 2011·Granted Jun 4, 2013·3 cites·20 claims
- 0263US8650511B2Lithography performance check methods and apparatusLU CHI-TA·Filed 2010·Granted Feb 11, 2014·1 cites·20 claims
- 0338US9136092B2Structure and method for E-beam writingLU CHI-TA·Filed 2012·Granted Sep 15, 2015·0 cites·18 claims
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