Assignee
LUMINESCENT TECHNOLOGIES INC
US·19 granted patents·688 citations·filing 2003–2010
Top patents by PatentIndex Score
19 records- 0197US8056021B2Method for time-evolving rectilinear contours representing photo masksLUMINESCENT TECHNOLOGIES INC·Filed 2010·Granted Nov 8, 2011·31 cites·21 claims
- 0297US7992109B2Method for time-evolving rectilinear contours representing photo masksLUMINESCENT TECHNOLOGIES INC·Filed 2010·Granted Aug 2, 2011·29 cites·20 claims
- 0397US7984391B2Method for time-evolving rectilinear contours representing photo masksLUMINESCENT TECHNOLOGIES INC·Filed 2010·Granted Jul 19, 2011·29 cites·20 claims
- 0497US7757201B2Method for time-evolving rectilinear contours representing photo masksLUMINESCENT TECHNOLOGIES INC·Filed 2007·Granted Jul 13, 2010·40 cites·19 claims
- 0597US7707541B2Systems, masks, and methods for photolithographyLUMINESCENT TECHNOLOGIES INC·Filed 2006·Granted Apr 27, 2010·61 cites·24 claims
- 0697US7703049B2System, masks, and methods for photomasks optimized with approximate and accurate merit functionsLUMINESCENT TECHNOLOGIES INC·Filed 2006·Granted Apr 20, 2010·43 cites·8 claims
- 0797US7441227B2Method for time-evolving rectilinear contours representing photo masksLUMINESCENT TECHNOLOGIES INC·Filed 2006·Granted Oct 21, 2008·49 cites·22 claims
- 0897US7178127B2Method for time-evolving rectilinear contours representing photo masksLUMINESCENT TECHNOLOGIES INC·Filed 2005·Granted Feb 13, 2007·58 cites·22 claims
- 0996US7805700B2Physical-resist model using fast sweepingLUMINESCENT TECHNOLOGIES INC·Filed 2007·Granted Sep 28, 2010·34 cites·22 claims
- 1096US7703068B2Technique for determining a mask pattern corresponding to a photo-maskLUMINESCENT TECHNOLOGIES INC·Filed 2007·Granted Apr 20, 2010·36 cites·24 claims
- 1196US7124394B1Method for time-evolving rectilinear contours representing photo masksLUMINESCENT TECHNOLOGIES INC·Filed 2003·Granted Oct 17, 2006·69 cites·16 claims
- 1295US7571423B2Optimized photomasks for photolithographyLUMINESCENT TECHNOLOGIES INC·Filed 2005·Granted Aug 4, 2009·51 cites·19 claims
- 1394US8386968B2Virtual photo-mask critical-dimension measurementLUMINESCENT TECHNOLOGIES INC·Filed 2010·Granted Feb 26, 2013·10 cites·25 claims
- 1494US7698665B2Systems, masks, and methods for manufacturable masks using a functional representation of polygon patternLUMINESCENT TECHNOLOGIES INC·Filed 2005·Granted Apr 13, 2010·68 cites·15 claims
- 1590US7480889B2Optimized photomasks for photolithographyLUMINESCENT TECHNOLOGIES INC·Filed 2003·Granted Jan 20, 2009·59 cites·11 claims
- 1682US7921385B2Mask-pattern determination using topology typesLUMINESCENT TECHNOLOGIES INC·Filed 2006·Granted Apr 5, 2011·7 cites·25 claims
- 1781US7793253B2Mask-patterns including intentional breaksLUMINESCENT TECHNOLOGIES INC·Filed 2006·Granted Sep 7, 2010·6 cites·23 claims
- 1873US8028252B2Technique for determining mask patterns and write patternsLUMINESCENT TECHNOLOGIES INC·Filed 2008·Granted Sep 27, 2011·3 cites·27 claims
- 1969US7788627B2Lithography verification using guard bandsLUMINESCENT TECHNOLOGIES INC·Filed 2006·Granted Aug 31, 2010·5 cites·22 claims
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