Assignee
MA YUANSHENG
US·2 granted patents·38 citations·filing 2007–2012
Top patents by PatentIndex Score
2 records- 0194US8741763B2Layout designs with via routing structuresMA YUANSHENG·Filed 2012·Granted Jun 3, 2014·38 cites·17 claims
- 0244US8067252B2Method for determining low-noise power spectral density for characterizing line edge roughness in semiconductor wafer processingMA YUANSHENG·Filed 2007·Granted Nov 29, 2011·0 cites·13 claims
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