Assignee
MADAN ARUN
US·2 granted patents·54 citations·filing 2000–2001
Technology mixC23C2
Top patents by PatentIndex Score
2 records- 0183US6258408B1Semiconductor vacuum deposition system and method having a reel-to-reel substrate cassetteMADAN ARUN·Filed 2000·Granted Jul 10, 2001·32 cites·18 claims
- 0279US6488777B2Semiconductor vacuum deposition system and method having a reel-to-reel substrate cassetteMADAN ARUN·Filed 2001·Granted Dec 3, 2002·22 cites·5 claims
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