Assignee
MAKINOUCHI SUSUMU
JP·7 granted patents·1 pending application·32 citations·filing 2008–2012
Top patents by PatentIndex Score
8 records- 0187US8760622B2Movable body apparatus, exposure apparatus and pattern formation apparatus, and device manufacturing methodMAKINOUCHI SUSUMU·Filed 2008·Granted Jun 24, 2014·15 cites·45 claims
- 0284US8208128B2Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing methodMAKINOUCHI SUSUMU·Filed 2009·Granted Jun 26, 2012·12 cites·66 claims
- 0369US8395110B2Encoder apparatus using liquid to suppress detection failureMAKINOUCHI SUSUMU·Filed 2010·Granted Mar 12, 2013·2 cites·36 claims
- 0467US8222594B2Encoder that optically detects positional information of a movable body by changing a path length through periodic oscillation of an optical elementMAKINOUCHI SUSUMU·Filed 2010·Granted Jul 17, 2012·2 cites·15 claims
- 0554US2012292539A1EncoderMAKINOUCHI SUSUMU·Filed 2012·Application pending·0 cites
- 0653US8390780B2Movable-body apparatus, exposure apparatus, exposure method, and device manufacturing methodMAKINOUCHI SUSUMU·Filed 2008·Granted Mar 5, 2013·1 cites·69 claims
- 0742US8710426B2Encoder that detects positional information of a moving body generating interference fringes that move in opposite directionsMAKINOUCHI SUSUMU·Filed 2011·Granted Apr 29, 2014·0 cites·11 claims
- 0842US8710425B2Encoder that optically detects positional information of a moving body from different optical paths lengthsMAKINOUCHI SUSUMU·Filed 2011·Granted Apr 29, 2014·0 cites·15 claims
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