Assignee
MANAKLI SERDAR
FR·4 granted patents·6 citations·filing 2011–2011
Top patents by PatentIndex Score
4 records- 0176US8713499B2Electron-beam lithography method with correction of line ends by insertion of contrast patternsMANAKLI SERDAR·Filed 2011·Granted Apr 29, 2014·4 cites·10 claims
- 0266US9607808B2Method of electron-beam lithography with correction of corner roundingsMANAKLI SERDAR·Filed 2011·Granted Mar 28, 2017·2 cites·14 claims
- 0343US9250540B2Lithography method with combined optimization of radiated energy and design geometryMANAKLI SERDAR·Filed 2011·Granted Feb 2, 2016·0 cites·15 claims
- 0441US9235132B2Large-mesh cell-projection electron-beam lithography methodMANAKLI SERDAR·Filed 2011·Granted Jan 12, 2016·0 cites·14 claims
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