Assignee
MANN HANS-JÜRGEN
DE·2 granted patents·6 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0176US9110225B2Illumination optics for a metrology system for examining an object using EUV illumination light and metrology system comprising an illumination optics of this typeMANN HANS-JÜRGEN·Filed 2011·Granted Aug 18, 2015·4 cites·21 claims
- 0274US8854606B2Projection exposure system, method for manufacturing a micro-structured structural member by the aid of such a projection exposure system and polarization-optical element adapted for use in such a systemMANN HANS-JÜRGEN·Filed 2011·Granted Oct 7, 2014·2 cites·20 claims
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