Assignee
MANN HANS-JUERGEN
DE·34 granted patents·2 pending applications·63 citations·filing 2006–2012
Top patents by PatentIndex Score
36 records- 0194US8810903B2Imaging optical systemMANN HANS-JUERGEN·Filed 2012·Granted Aug 19, 2014·6 cites·36 claims
- 0291US8817233B2Illumination optical system for projection lithographyMANN HANS-JUERGEN·Filed 2011·Granted Aug 26, 2014·7 cites·25 claims
- 0389US8169694B2Catoptric objectives and systems using catoptric objectivesMANN HANS-JUERGEN·Filed 2009·Granted May 1, 2012·7 cites·29 claims
- 0487US8317345B2Catoptric objectives and systems using catoptric objectivesMANN HANS-JUERGEN·Filed 2011·Granted Nov 27, 2012·5 cites·14 claims
- 0586US8873122B2Microlithographic imaging optical system including multiple mirrorsMANN HANS-JUERGEN·Filed 2011·Granted Oct 28, 2014·4 cites·23 claims
- 0682US8094380B2Projection objective and projection exposure apparatus with negative back focus of the entry pupilMANN HANS-JUERGEN·Filed 2010·Granted Jan 10, 2012·5 cites·25 claims
- 0781US8576376B2Imaging optical system and projection exposure system for microlithographyMANN HANS-JUERGEN·Filed 2010·Granted Nov 5, 2013·4 cites·26 claims
- 0879US8208200B2Imaging optical systemMANN HANS-JUERGEN·Filed 2011·Granted Jun 26, 2012·3 cites·20 claims
- 0978US8643824B2Projection optics for microlithographyMANN HANS-JUERGEN·Filed 2011·Granted Feb 4, 2014·3 cites·23 claims
- 1078US8610877B2Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this typeMANN HANS-JUERGEN·Filed 2011·Granted Dec 17, 2013·3 cites·20 claims
- 1174US9529276B2Microlithography projection exposure apparatus having at least two operating statesMANN HANS-JUERGEN·Filed 2011·Granted Dec 27, 2016·2 cites·25 claims
- 1273US8842284B2Magnifying imaging optical unit and metrology system including sameMANN HANS-JUERGEN·Filed 2012·Granted Sep 23, 2014·2 cites·20 claims
- 1373US8717538B2Catoptric imaging optical system with an arc-shaped object fieldMANN HANS-JUERGEN·Filed 2010·Granted May 6, 2014·2 cites·26 claims
- 1473US8614785B2Microlithography projection system with an accessible diaphragm or aperture stopMANN HANS-JUERGEN·Filed 2011·Granted Dec 24, 2013·1 cites·20 claims
- 1572US9013677B2Imaging optics, microlithography projection exposure apparatus having same and related methodsMANN HANS-JUERGEN·Filed 2012·Granted Apr 21, 2015·2 cites·20 claims
- 1670US8605255B2Imaging optical system and projection exposure system including the sameMANN HANS-JUERGEN·Filed 2010·Granted Dec 10, 2013·2 cites·25 claims
- 1769US8970819B2Microlithography projection optical system, tool and method of productionMANN HANS-JUERGEN·Filed 2008·Granted Mar 3, 2015·1 cites·34 claims
- 1867US8558991B2Imaging optical system and related installation and methodMANN HANS-JUERGEN·Filed 2010·Granted Oct 15, 2013·2 cites·20 claims
- 1964US8208127B2Combination stop for catoptric projection arrangementMANN HANS-JUERGEN·Filed 2008·Granted Jun 26, 2012·1 cites·35 claims
- 2060US9057964B2Imaging optics and projection exposure installation for microlithography with an imaging opticsMANN HANS-JUERGEN·Filed 2011·Granted Jun 16, 2015·1 cites·20 claims
- 2158US9465300B2Catoptric objectives and systems using catoptric objectivesMANN HANS-JUERGEN·Filed 2012·Granted Oct 11, 2016·0 cites·34 claims
- 2257US8810927B2Projection objective and projection exposure apparatus with negative back focus of the entry pupilMANN HANS-JUERGEN·Filed 2011·Granted Aug 19, 2014·0 cites·22 claims
- 2356US10481500B2Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this typeMANN HANS JUERGEN·Filed 2011·Granted Nov 19, 2019·0 cites·14 claims
- 2455US8436985B2Combination stop for catoptric projection arrangementMANN HANS-JUERGEN·Filed 2012·Granted May 7, 2013·0 cites·36 claims
- 2555US8268518B2Method and lithography device with a mask reflecting lightMANN HANS-JUERGEN·Filed 2011·Granted Sep 18, 2012·0 cites·17 claims
- 2652US8837041B2Magnifying imaging optical system and metrology system with an imaging optical system of this typeMANN HANS-JUERGEN·Filed 2011·Granted Sep 16, 2014·0 cites·18 claims
- 2751US8827467B2Magnifying imaging optical unit and metrology system including sameMANN HANS-JUERGEN·Filed 2012·Granted Sep 9, 2014·0 cites·26 claims
- 2849US9182578B2Imaging optical system and illumination optical systemMANN HANS-JUERGEN·Filed 2011·Granted Nov 10, 2015·0 cites·38 claims
- 2948US9134626B2Microscope and microscopy method for space-resolved measurement of a predetermined structure, in particular a structure of a lithographic maskMANN HANS-JUERGEN·Filed 2007·Granted Sep 15, 2015·0 cites·25 claims
- 3047US9442386B2Imaging opticsMANN HANS-JUERGEN·Filed 2011·Granted Sep 13, 2016·0 cites·24 claims
- 3147US8944615B2Projection objective and method for its manufactureMANN HANS-JUERGEN·Filed 2010·Granted Feb 3, 2015·0 cites·23 claims
- 3247US8711472B2Optical imaging device and imaging method for microscopyMANN HANS-JUERGEN·Filed 2009·Granted Apr 29, 2014·0 cites·26 claims
- 3346US9639004B2Imaging optics and projection exposure installation for microlithography with an imaging opticsMANN HANS-JUERGEN·Filed 2011·Granted May 2, 2017·0 cites·20 claims
- 3443US8610876B2Reflective optical element, projection system, and projection exposure apparatusMANN HANS-JUERGEN·Filed 2011·Granted Dec 17, 2013·0 cites·23 claims
- 3543US2009213345A1Microlithography exposure apparatus using polarized light and microlithography projection system having concave primary and secondary mirrorsMANN HANS-JUERGEN·Filed 2006·Application pending·0 cites
- 3641US2012274917A1Imaging opticsMANN HANS-JUERGEN·Filed 2012·Application pending·0 cites
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