Assignee

MANSFIELD SCOTT M

US·2 granted patents·9 citations·filing 2009–2010

Technology mixG03F2 G06F1

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2 records

0188US8392871B2Decomposition with multiple exposures in a process window based OPC flow using tolerance bandsMANSFIELD SCOTT M·Filed 2010·Granted Mar 5, 2013·7 cites·14 claims
0266US8166423B2Photomask design verificationMANSFIELD SCOTT M·Filed 2009·Granted Apr 24, 2012·2 cites·20 claims

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