Assignee
MAPPER LITHOGRAPHY IP BV
NL·85 granted patents·8 pending applications·1,038 citations·filing 2002–2017
Top patents by PatentIndex Score
93 records- 0199US7129502B2Apparatus for generating a plurality of beamletsMAPPER LITHOGRAPHY IP BV·Filed 2004·Granted Oct 31, 2006·162 cites·30 claims
- 0298US7091504B2Electron beam exposure systemMAPPER LITHOGRAPHY IP BV·Filed 2005·Granted Aug 15, 2006·50 cites·36 claims
- 0398US6897458B2Electron beam exposure systemMAPPER LITHOGRAPHY IP BV·Filed 2003·Granted May 24, 2005·144 cites·36 claims
- 0496US6958804B2Lithography systemMAPPER LITHOGRAPHY IP BV·Filed 2003·Granted Oct 25, 2005·135 cites·41 claims
- 0595US7084414B2Charged particle beamlet exposure systemMAPPER LITHOGRAPHY IP BV·Filed 2004·Granted Aug 1, 2006·118 cites·23 claims
- 0694US9981293B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsMAPPER LITHOGRAPHY IP BV·Filed 2016·Granted May 29, 2018·9 cites·29 claims
- 0794US9184026B2Proximity effect correction in a charged particle lithography systemMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Nov 10, 2015·12 cites·20 claims
- 0894US8859983B2Method of and system for exposing a targetMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted Oct 14, 2014·15 cites·20 claims
- 0994US7868300B2Lithography system, sensor and measuring methodMAPPER LITHOGRAPHY IP BV·Filed 2006·Granted Jan 11, 2011·30 cites·37 claims
- 1093US9978562B2Method for exposing a waferMAPPER LITHOGRAPHY IP BV·Filed 2014·Granted May 22, 2018·13 cites·22 claims
- 1193US7842936B2Lithography system and projection methodMAPPER LITHOGRAPHY IP BV·Filed 2007·Granted Nov 30, 2010·20 cites·15 claims
- 1293US7569833B2Apparatus for generating a plurality of beamletsMAPPER LITHOGRAPHY IP BV·Filed 2006·Granted Aug 4, 2009·13 cites·17 claims
- 1391US10079206B2Fabricating unique chips using a charged particle multi-beamlet lithography systemMAPPER LITHOGRAPHY IP BV·Filed 2016·Granted Sep 18, 2018·5 cites·21 claims
- 1491US7019908B2Modulator circuitryMAPPER LITHOGRAPHY IP BV·Filed 2004·Granted Mar 28, 2006·88 cites·27 claims
- 1591US6919952B2Direct write lithography systemMAPPER LITHOGRAPHY IP BV·Filed 2003·Granted Jul 19, 2005·33 cites·20 claims
- 1689US9165693B2Multi-electrode cooling arrangementMAPPER LITHOGRAPHY IP BV·Filed 2014·Granted Oct 20, 2015·7 cites·32 claims
- 1789US7709815B2Lithography system and projection methodMAPPER LITHOGRAPHY IP BV·Filed 2006·Granted May 4, 2010·19 cites·22 claims
- 1889US7391037B2Apparatus for generating a plurality of beamletsMAPPER LITHOGRAPHY IP BV·Filed 2006·Granted Jun 24, 2008·7 cites·32 claims
- 1989US7365338B2Apparatus for generating a plurality of beamletsMAPPER LITHOGRAPHY IP BV·Filed 2006·Granted Apr 29, 2008·8 cites·5 claims
- 2088US9665013B2Lithography system, method of clamping and wafer tableMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted May 30, 2017·4 cites·19 claims
- 2188US9575418B2Apparatus for transferring a substrate in a lithography systemMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Feb 21, 2017·4 cites·22 claims
- 2287US7348567B1Apparatus for generating a plurality of beamletsMAPPER LITHOGRAPHY IP BV·Filed 2006·Granted Mar 25, 2008·6 cites·22 claims
- 2386US10037864B2High voltage shielding and cooling in a charged particle beam generatorMAPPER LITHOGRAPHY IP BV·Filed 2017·Granted Jul 31, 2018·3 cites·37 claims
- 2486US10008362B1Optical fiber feedthrough device and fiber path arrangementMAPPER LITHOGRAPHY IP BV·Filed 2016·Granted Jun 26, 2018·7 cites·21 claims
- 2585US10048599B2Adjustment assembly and substrate exposure system comprising such an adjustment assemblyMAPPER LITHOGRAPHY IP BV·Filed 2016·Granted Aug 14, 2018·4 cites·37 claims
- 2685US8841920B2Capacitive sensing systemMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted Sep 23, 2014·3 cites·29 claims
- 2784US10054863B2Method of determining a position of a substrate in a lithography system, substrate for use in such a method, and lithography system for carrying out such methodMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Aug 21, 2018·3 cites·28 claims
- 2884US8890094B2Projection lens arrangementMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted Nov 18, 2014·6 cites·19 claims
- 2983US10133186B2Method and apparatus for aligning substrates on a substrate support unitMAPPER LITHOGRAPHY IP BV·Filed 2016·Granted Nov 20, 2018·4 cites·31 claims
- 3083US9829804B1Substrate holding device, method for manufacturing such a device, and use of such a device in a lithography systemMAPPER LITHOGRAPHY IP BV·Filed 2016·Granted Nov 28, 2017·4 cites·31 claims
- 3183US8362441B2Enhanced integrity projection lens assemblyMAPPER LITHOGRAPHY IP BV·Filed 2010·Granted Jan 29, 2013·7 cites·54 claims
- 3282US8916837B2Charged particle lithography system with intermediate chamberMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted Dec 23, 2014·4 cites·23 claims
- 3381US10078274B2Method and arrangement for handling and processing substratesMAPPER LITHOGRAPHY IP BV·Filed 2016·Granted Sep 18, 2018·2 cites·17 claims
- 3480US9653259B2Method for determining a beamlet position and method for determining a distance between two beamlets in a multi-beamlet exposure apparatusMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted May 16, 2017·5 cites·17 claims
- 3580US7612866B2Lithography systemMAPPER LITHOGRAPHY IP BV·Filed 2007·Granted Nov 3, 2009·5 cites·25 claims
- 3680US7453075B2Charged particle beam exposure systemMAPPER LITHOGRAPHY IP BV·Filed 2005·Granted Nov 18, 2008·4 cites·23 claims
- 3779US9934943B2Beam grid layoutMAPPER LITHOGRAPHY IP BV·Filed 2014·Granted Apr 3, 2018·3 cites·33 claims
- 3878US7868307B2Charged particle beam exposure systemMAPPER LITHOGRAPHY IP BV·Filed 2008·Granted Jan 11, 2011·5 cites·11 claims
- 3977US9457549B2Method for forming an optical fiber arrayMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Oct 4, 2016·2 cites·19 claims
- 4076US9447839B2Support module for lithography systemMAPPER LITHOGRAPHY IP BV·Filed 2012·Granted Sep 20, 2016·11 cites·26 claims
- 4175US7019312B2Adjustment in a MAPPER systemMAPPER LITHOGRAPHY IP BV·Filed 2003·Granted Mar 28, 2006·10 cites·58 claims
- 4274US9263234B2Target processing unitMAPPER LITHOGRAPHY IP BV·Filed 2014·Granted Feb 16, 2016·2 cites·21 claims
- 4373US9653261B2Charged particle lithography system and beam generatorMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted May 16, 2017·2 cites·27 claims
- 4473US9466453B2Cathode arrangement, electron gun, and lithography system comprising such electron gunMAPPER LITHOGRAPHY IP BV·Filed 2014·Granted Oct 11, 2016·2 cites·21 claims
- 4573US8366423B2Method and arrangement for realizing a vacuum in a vacuum chamberMAPPER LITHOGRAPHY IP BV·Filed 2010·Granted Feb 5, 2013·3 cites·26 claims
- 4671US9665014B2Charged particle lithography system with alignment sensor and beam measurement sensorMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted May 30, 2017·2 cites·18 claims
- 4771US9645511B2Lithography system, method of clamping and wafer tableMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted May 9, 2017·1 cites·14 claims
- 4871US9484188B2Individual beam pattern placement verification in multiple beam lithographyMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Nov 1, 2016·1 cites·25 claims
- 4971US9224580B2Plasma generatorMAPPER LITHOGRAPHY IP BV·Filed 2012·Granted Dec 29, 2015·4 cites·19 claims
- 5071US9111657B2Charged particle optical deviceMAPPER LITHOGRAPHY IP BV·Filed 2014·Granted Aug 18, 2015·4 cites·29 claims
Showing the top 50 of 93 patent records by PatentIndex Score.
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