Assignee
MARXSEN GERD
DE·1 granted patent·3 pending applications·8 citations·filing 2005–2010
Top patents by PatentIndex Score
4 records- 0182US8183139B2Reduced defectivity in contacts of a semiconductor device comprising replacement gate electrode structures by using an intermediate cap layerMARXSEN GERD·Filed 2010·Granted May 22, 2012·8 cites·20 claims
- 0241US2008242196A1Method and system for controlling chemical mechanical polishing by taking zone specific substrate data into accountMARXSEN GERD·Filed 2007·Application pending·0 cites
- 0338US2010112816A1Method of reducing non-uniformities during chemical mechanical polishing of microstructure devices by using cmp pads in a glazed modeMARXSEN GERD·Filed 2009·Application pending·0 cites
- 0432US2006172527A1Method for forming a defined recess in a damascene structure using a CMP process and a damascene structureMARXSEN GERD·Filed 2005·Application pending·0 cites
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