Assignee
MASUDA NORIIKI
JP·1 granted patent·1 pending application·38 citations·filing 2007–2008
Top patents by PatentIndex Score
2 records- 0189US8430962B2Gas supply device, substrate processing apparatus and substrate processing methodMASUDA NORIIKI·Filed 2008·Granted Apr 30, 2013·38 cites·20 claims
- 0245US2008078746A1Substrate processing system, gas supply unit, method of substrate processing, computer program, and storage mediumMASUDA NORIIKI·Filed 2007·Application pending·0 cites
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