Assignee

MATERIALS TECHNOLOGY CORP SUBS

US·1 granted patent·685 citations·filing 1988–1988

Technology mixC23C1 Y10S1 Y10T1

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0197US4978567AWafer holding fixture for chemical reaction processes in rapid thermal processing equipment and method for making sameMATERIALS TECHNOLOGY CORP SUBS·Filed 1988·Granted Dec 18, 1990·685 cites·8 claims

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