Assignee
MATRIX INTEGRATED SYSTEMS
US·2 granted patents·158 citations·filing 1990–1990
Technology mixH10P2
Top patents by PatentIndex Score
2 records- 0180US4971653ATemperature controlled chuck for elevated temperature etch processingMATRIX INTEGRATED SYSTEMS·Filed 1990·Granted Nov 20, 1990·88 cites·10 claims
- 0277US5015331AMethod of plasma etching with parallel plate reactor having a gridMATRIX INTEGRATED SYSTEMS·Filed 1990·Granted May 14, 1991·70 cites·34 claims
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