Assignee
MATRIX INTEGRATED SYSTEMS INC
US·11 granted patents·400 citations·filing 1991–2002
Top patents by PatentIndex Score
11 records- 0197US6263830B1Microwave choke for remote plasma generatorMATRIX INTEGRATED SYSTEMS INC·Filed 2000·Granted Jul 24, 2001·87 cites·25 claims
- 0293US6499777B1End-effector with integrated cooling mechanismMATRIX INTEGRATED SYSTEMS INC·Filed 2000·Granted Dec 31, 2002·94 cites·22 claims
- 0388US6461801B1Rapid heating and cooling of workpiece chucksMATRIX INTEGRATED SYSTEMS INC·Filed 2000·Granted Oct 8, 2002·42 cites·17 claims
- 0484US6228773B1Synchronous multiplexed near zero overhead architecture for vacuum processesMATRIX INTEGRATED SYSTEMS INC·Filed 1998·Granted May 8, 2001·64 cites·45 claims
- 0581US6352050B2Remote plasma mixerMATRIX INTEGRATED SYSTEMS INC·Filed 2000·Granted Mar 5, 2002·30 cites·23 claims
- 0676US6660975B2Method for producing flat wafer chucksMATRIX INTEGRATED SYSTEMS INC·Filed 2002·Granted Dec 9, 2003·17 cites·10 claims
- 0771US6412438B2Downstream sapphire elbow joint for remote plasma generatorMATRIX INTEGRATED SYSTEMS INC·Filed 2000·Granted Jul 2, 2002·17 cites·22 claims
- 0871US6409932B2Method and apparatus for increased workpiece throughputMATRIX INTEGRATED SYSTEMS INC·Filed 2000·Granted Jun 25, 2002·11 cites·23 claims
- 0968US6605226B2Method for increased workpiece throughputMATRIX INTEGRATED SYSTEMS INC·Filed 2002·Granted Aug 12, 2003·9 cites·10 claims
- 1067US6736927B2Apparatus for increased workpiece throughputMATRIX INTEGRATED SYSTEMS INC·Filed 2002·Granted May 18, 2004·9 cites·18 claims
- 1149US5209803AParallel plate reactor and method of useMATRIX INTEGRATED SYSTEMS INC·Filed 1991·Granted May 11, 1993·20 cites·43 claims
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