Assignee
MATSUI YUKITERU
JP·2 granted patents·6 pending applications·4 citations·filing 2007–2012
Top patents by PatentIndex Score
8 records- 0169US8703004B2Method for chemical planarization and chemical planarization apparatusMATSUI YUKITERU·Filed 2012·Granted Apr 22, 2014·2 cites·20 claims
- 0266US8685857B2Chemical mechanical polishing method of organic film and method of manufacturing semiconductor deviceMATSUI YUKITERU·Filed 2008·Granted Apr 1, 2014·2 cites·8 claims
- 0346US2009156000A1Method of manufacturing semiconductor deviceMATSUI YUKITERU·Filed 2008·Application pending·0 cites
- 0444US2008227297A1Chemical mechanical polishing method and method for manufacturing semiconductor deviceMATSUI YUKITERU·Filed 2008·Application pending·0 cites
- 0544US2011294291A1Semiconductor device and method of manufacturing the sameMATSUI YUKITERU·Filed 2011·Application pending·0 cites
- 0643US2007284338A1Chemical mechanical polishing methodMATSUI YUKITERU·Filed 2007·Application pending·0 cites
- 0743US2009258493A1Semiconductor device manufacturing methodMATSUI YUKITERU·Filed 2009·Application pending·0 cites
- 0831US2011070745A1Polishing method, polishing apparatus, and manufacturing method of semiconductor deviceMATSUI YUKITERU·Filed 2010·Application pending·0 cites
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