Assignee
MATSUMOTO NAOKI
JP·18 granted patents·1 pending application·1,373 citations·filing 2007–2012
Top patents by PatentIndex Score
19 records- 0198USD697038SBaffle plateMATSUMOTO NAOKI·Filed 2012·Granted Jan 7, 2014·440 cites·1 claims
- 0298USD694790SBaffle plate for manufacturing semiconductorMATSUMOTO NAOKI·Filed 2012·Granted Dec 3, 2013·450 cites·1 claims
- 0395US9263298B2Plasma etching apparatus and plasma etching methodMATSUMOTO NAOKI·Filed 2009·Granted Feb 16, 2016·446 cites·7 claims
- 0486US8268643B2Substrate, epitaxial layer provided substrate, method for producing substrate, and method for producing epitaxial layer provided substrateMATSUMOTO NAOKI·Filed 2009·Granted Sep 18, 2012·9 cites·11 claims
- 0579US8138445B2Plasma processing apparatus and plasma processing methodMATSUMOTO NAOKI·Filed 2007·Granted Mar 20, 2012·4 cites·15 claims
- 0677US9650565B2Carbazole compound and use thereofMATSUMOTO NAOKI·Filed 2010·Granted May 16, 2017·2 cites·1 claims
- 0775US8800484B2Plasma processing apparatusMATSUMOTO NAOKI·Filed 2009·Granted Aug 12, 2014·6 cites·12 claims
- 0871US8115520B2Driver circuitMATSUMOTO NAOKI·Filed 2009·Granted Feb 14, 2012·3 cites·6 claims
- 0966US8513563B2Plasma processing apparatus and plasma processing methodMATSUMOTO NAOKI·Filed 2012·Granted Aug 20, 2013·1 cites·7 claims
- 1063USD694791SBaffle plate for manufacturing semiconductorMATSUMOTO NAOKI·Filed 2012·Granted Dec 3, 2013·12 cites·1 claims
- 1154US8592948B2Substrate, epitaxial layer provided substrate, method for producing substrate, and method for producing epitaxial layer provided substrateMATSUMOTO NAOKI·Filed 2012·Granted Nov 26, 2013·0 cites·4 claims
- 1254US8506753B2Capacitive coupling plasma processing apparatus and method for using the sameMATSUMOTO NAOKI·Filed 2011·Granted Aug 13, 2013·0 cites·15 claims
- 1354US8455367B2Method of manufacturing nitride substrate for semiconductorsMATSUMOTO NAOKI·Filed 2011·Granted Jun 4, 2013·0 cites·4 claims
- 1453US8753475B2Plasma processing apparatusMATSUMOTO NAOKI·Filed 2009·Granted Jun 17, 2014·0 cites·6 claims
- 1551US8877004B2Plasma processing apparatus and plasma processing methodMATSUMOTO NAOKI·Filed 2009·Granted Nov 4, 2014·0 cites·4 claims
- 1646US9112399B2MotorMATSUMOTO NAOKI·Filed 2012·Granted Aug 18, 2015·0 cites·5 claims
- 1746US9035509B2MotorMATSUMOTO NAOKI·Filed 2012·Granted May 19, 2015·0 cites·5 claims
- 1842US9595425B2Antenna, dielectric window, plasma processing apparatus and plasma processing methodMATSUMOTO NAOKI·Filed 2012·Granted Mar 14, 2017·0 cites·8 claims
- 1940US2013061841A1Saw wire and method of manufacturing group iii nitride crystal substrate using the sameMATSUMOTO NAOKI·Filed 2012·Application pending·0 cites
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