Assignee
MATSUZAKI KAZUYOSHI
JP·1 granted patent·1 pending application·1 citations·filing 2010–2012
Top patents by PatentIndex Score
2 records- 0151US8818545B2Semiconductor fabrication apparatus and temperature adjustment methodMATSUZAKI KAZUYOSHI·Filed 2010·Granted Aug 26, 2014·1 cites·10 claims
- 0228US2012204576A1Cooling unit, processing chamber, part in the processing chamber, and cooling methodMATSUZAKI KAZUYOSHI·Filed 2012·Application pending·0 cites
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