Assignee
MAUL MANFRED
DE·2 granted patents·1 pending application·1 citations·filing 2005–2012
Top patents by PatentIndex Score
3 records- 0167US8480261B2Filter device for the compensation of an asymmetric pupil illuminationMAUL MANFRED·Filed 2012·Granted Jul 9, 2013·1 cites·21 claims
- 0251US8246211B2Filter device for the compensation of an asymmetric pupil illuminationMAUL MANFRED·Filed 2011·Granted Aug 21, 2012·0 cites·27 claims
- 0338US2005243222A1Optical system of a microlithographic projection exposure apparatusMAUL MANFRED·Filed 2005·Application pending·0 cites
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