Assignee
MCHUGH PAUL R
US·3 granted patents·1 pending application·15 citations·filing 2010–2012
Top patents by PatentIndex Score
4 records- 0194US8496789B2Electrochemical processorMCHUGH PAUL R·Filed 2011·Granted Jul 30, 2013·9 cites·20 claims
- 0288US8313631B2Apparatus and methods for electrochemical processing of microfeature wafersMCHUGH PAUL R·Filed 2010·Granted Nov 20, 2012·3 cites·11 claims
- 0385US9222195B2Electroplating systems and methods for high sheet resistance substratesMCHUGH PAUL R·Filed 2012·Granted Dec 29, 2015·3 cites·7 claims
- 0444US2012199475A1Processing apparatus with vertical liquid agitationMCHUGH PAUL R·Filed 2011·Application pending·0 cites
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