Assignee
MCNEIL JOHN R
US·4 granted patents·621 citations·filing 1985–1991
Top patents by PatentIndex Score
4 records- 0196US5241369ATwo-dimensional optical scatterometer apparatus and processMCNEIL JOHN R·Filed 1990·Granted Aug 31, 1993·190 cites·30 claims
- 0296US4710642AOptical scatterometer having improved sensitivity and bandwidthMCNEIL JOHN R·Filed 1985·Granted Dec 1, 1987·194 cites·10 claims
- 0393US5164790ASimple CD measurement of periodic structures on photomasksMCNEIL JOHN R·Filed 1991·Granted Nov 17, 1992·178 cites·10 claims
- 0493US4758304AMethod and apparatus for ion etching and depositionMCNEIL JOHN R·Filed 1987·Granted Jul 19, 1988·59 cites·21 claims
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