Assignee
MELZER FRANK
DE·3 granted patents·2 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0160US8454230B2Method and system for indirect determination of local irradiance in an optical systemMELZER FRANK·Filed 2010·Granted Jun 4, 2013·1 cites·39 claims
- 0256US8269947B2Optical system for semiconductor lithographyMELZER FRANK·Filed 2009·Granted Sep 18, 2012·1 cites·21 claims
- 0353US9383544B2Optical system for semiconductor lithographyMELZER FRANK·Filed 2012·Granted Jul 5, 2016·0 cites·16 claims
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