Assignee
MEMSENSING MICROSYSTEMS TECHNOLOGY CO LTD
CN·2 granted patents·1 pending application·46 citations·filing 2010–2013
Top patents by PatentIndex Score
3 records- 0194US7998776B1Methods for manufacturing MEMS sensor and thin film thereof with improved etching processMEMSENSING MICROSYSTEMS TECHNOLOGY CO LTD·Filed 2010·Granted Aug 16, 2011·20 cites·20 claims
- 0294US7972888B1Methods for manufacturing MEMS sensor and thin film and cantilever beam thereof with epitaxial growth processMEMSENSING MICROSYSTEMS TECHNOLOGY CO LTD·Filed 2010·Granted Jul 5, 2011·26 cites·20 claims
- 0338US2013221456A1Capacitance Type Micro-Silicon Microphone and Method for Making the SameMEMSENSING MICROSYSTEMS TECHNOLOGY CO LTD·Filed 2013·Application pending·0 cites
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