Assignee
MENCHTCHIKOV BORIS
NL·4 granted patents·12 citations·filing 2011–2011
Top patents by PatentIndex Score
4 records- 0187US9310698B2Method and apparatus for controlling a lithographic apparatusMENCHTCHIKOV BORIS·Filed 2011·Granted Apr 12, 2016·6 cites·13 claims
- 0285US8717536B2Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program productMENCHTCHIKOV BORIS·Filed 2011·Granted May 6, 2014·5 cites·15 claims
- 0366US8793099B2Calibration of lithographic apparatusMENCHTCHIKOV BORIS·Filed 2011·Granted Jul 29, 2014·1 cites·14 claims
- 0448US9069240B2Calibration of lithographic apparatus by exposing patterns on substrate positioned at different orientationsMENCHTCHIKOV BORIS·Filed 2011·Granted Jun 30, 2015·0 cites·9 claims
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