Assignee
MERRY NIR
US·5 granted patents·55 citations·filing 2008–2012
Top patents by PatentIndex Score
5 records- 0194US8894344B2Vertical wafer buffering systemMERRY NIR·Filed 2008·Granted Nov 25, 2014·38 cites·20 claims
- 0290US8150242B2Use of infrared camera for real-time temperature monitoring and controlMERRY NIR·Filed 2008·Granted Apr 3, 2012·14 cites·16 claims
- 0376US8724976B2Use of infrared camera for real-time temperature monitoring and controlMERRY NIR·Filed 2012·Granted May 13, 2014·3 cites·20 claims
- 0466US8425977B2Substrate processing chamber with off-center gas delivery funnelMERRY NIR·Filed 2008·Granted Apr 23, 2013·0 cites·18 claims
- 0563US8419855B2Substrate processing chamber with off-center gas delivery funnelMERRY NIR·Filed 2011·Granted Apr 16, 2013·0 cites·20 claims
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