Assignee

MESTROM WILBERT JAN

NL·2 granted patents·12 citations·filing 2010–2012

Technology mixG03F2 H05G2 B03C1

Top patents by PatentIndex Score

2 records

0191US8598551B2EUV radiation source comprising a droplet accelerator and lithographic apparatusMESTROM WILBERT JAN·Filed 2010·Granted Dec 3, 2013·11 cites·15 claims
0252US9007560B2Radiation sourceMESTROM WILBERT JAN·Filed 2012·Granted Apr 14, 2015·1 cites·13 claims

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