Assignee
MICO CERAM LTD
KR·25 granted patents·22 pending applications·11 citations·filing 2018–2025
Top patents by PatentIndex Score
47 records- 0187US2026047391A1Electrostatic chuck heater and manufacturing method thereforMICO CERAM LTD·Filed 2025·Application pending·0 cites
- 0286US12154799B2Susceptor for high-temperature use having shaft with low thermal conductivityMICO CERAM LTD·Filed 2022·Granted Nov 26, 2024·2 cites·5 claims
- 0386US11990322B2Ceramic susceptorMICO CERAM LTD·Filed 2023·Granted May 21, 2024·1 cites·7 claims
- 0484US12406875B2Susceptor including purge gas flow passageMICO CERAM LTD·Filed 2024·Granted Sep 2, 2025·1 cites·9 claims
- 0581US11955320B2Ceramic susceptorMICO CERAM LTD·Filed 2022·Granted Apr 9, 2024·1 cites·4 claims
- 0677US12538749B2Electrostatic chuck heater and manufacturing method thereforMICO CERAM LTD·Filed 2023·Granted Jan 27, 2026·0 cites·4 claims
- 0773US12040209B2Electrostatic chuck heater and manufacturing method thereforMICO CERAM LTD·Filed 2019·Granted Jul 16, 2024·1 cites·19 claims
- 0870US12444584B2Ceramic susceptorMICO CERAM LTD·Filed 2024·Granted Oct 14, 2025·0 cites·15 claims
- 0970US11581211B2Electrostatic chuck having a cooling structureMICO CERAM LTD·Filed 2020·Granted Feb 14, 2023·1 cites·19 claims
- 1070US11395377B2Ceramic heater having improved durabilityMICO CERAM LTD·Filed 2018·Granted Jul 19, 2022·2 cites·16 claims
- 1168US11508586B2Aluminum nitride sintered body and member for semiconductor manufacuting apparatus comprising sameMICO CERAM LTD·Filed 2018·Granted Nov 22, 2022·2 cites·5 claims
- 1267US2025304507A1Method for manufacturing ceramic heaterMICO CERAM LTD·Filed 2025·Application pending·0 cites
- 1366US11908725B2Electrostatic chuck heater and manufacturing method thereforMICO CERAM LTD·Filed 2020·Granted Feb 20, 2024·0 cites·12 claims
- 1465US12469734B2Ceramic susceptorMICO CERAM LTD·Filed 2024·Granted Nov 11, 2025·0 cites·11 claims
- 1564US12406864B2SusceptorMICO CERAM LTD·Filed 2024·Granted Sep 2, 2025·0 cites·14 claims
- 1663US2025125184A1Ceramic susceptor and method of manufacturing sameMICO CERAM LTD·Filed 2024·Application pending·0 cites
- 1762US12550689B2Aluminum nitride sintered body and member for semiconductor manufacturing apparatus comprising sameMICO CERAM LTD·Filed 2022·Granted Feb 10, 2026·0 cites·6 claims
- 1862US12237204B1Ceramic susceptor and method of manufacturing sameMICO CERAM LTD·Filed 2024·Granted Feb 25, 2025·0 cites·10 claims
- 1961US2024410054A1Susceptor manufacturing method and susceptor manufactured by the sameMICO CERAM LTD·Filed 2024·Application pending·0 cites
- 2061US2025116002A1Ceramic susceptorMICO CERAM LTD·Filed 2024·Application pending·0 cites
- 2160US11963270B2Ceramic susceptorMICO CERAM LTD·Filed 2023·Granted Apr 16, 2024·0 cites·8 claims
- 2260US2026067997A1SusceptorMICO CERAM LTD·Filed 2025·Application pending·0 cites
- 2360US2024203782A1Susceptor and method of manufacturing the sameMICO CERAM LTD·Filed 2023·Application pending·0 cites
- 2459US2024412999A1Ceramic susceptor and method of manufacturing the sameMICO CERAM LTD·Filed 2024·Application pending·0 cites
- 2559US2025168933A1Ceramic heaterMICO CERAM LTD·Filed 2024·Application pending·0 cites
- 2658US12283513B2Ceramic susceptorMICO CERAM LTD·Filed 2024·Granted Apr 22, 2025·0 cites·11 claims
- 2758US2026088736A1Electrostatic chuckMICO CERAM LTD·Filed 2025·Application pending·0 cites
- 2856US12351525B2Method for manufacturing ceramic heaterMICO CERAM LTD·Filed 2021·Granted Jul 8, 2025·0 cites·9 claims
- 2956US2023212083A1Method for manufacturing ceramic susceptorMICO CERAM LTD·Filed 2022·Application pending·0 cites
- 3056US2025331069A1Ceramic heaterMICO CERAM LTD·Filed 2025·Application pending·0 cites
- 3155US2023356342A1Electrostatic chuckMICO CERAM LTD·Filed 2023·Application pending·0 cites
- 3255US2025167019A1Ceramic heaterMICO CERAM LTD·Filed 2024·Application pending·0 cites
- 3354US12280566B2Ceramic susceptorMICO CERAM LTD·Filed 2023·Granted Apr 22, 2025·0 cites·5 claims
- 3453US11735459B2Electrostatic chuckMICO CERAM LTD·Filed 2022·Granted Aug 22, 2023·0 cites·7 claims
- 3550US2025220776A1Ceramic SusceptorMICO CERAM LTD·Filed 2024·Application pending·0 cites
- 3650US2025079233A1Ceramic susceptorMICO CERAM LTD·Filed 2024·Application pending·0 cites
- 3749US2025351235A1Ceramic heaterMICO CERAM LTD·Filed 2023·Application pending·0 cites
- 3849US2024063033A1Substrate heating device configured to suppress crack generationMICO CERAM LTD·Filed 2023·Application pending·0 cites
- 3946US11937345B2Ceramic heaterMICO CERAM LTD·Filed 2020·Granted Mar 19, 2024·0 cites·8 claims
- 4046US2023068876A1Substrate heating apparatus with enhanced temperature uniformity characteristicMICO CERAM LTD·Filed 2022·Application pending·0 cites
- 4146US2022039212A1Ceramic heater for independently controlling middle regionMICO CERAM LTD·Filed 2019·Application pending·0 cites
- 4244US12089296B2Ceramic heaterMICO CERAM LTD·Filed 2019·Granted Sep 10, 2024·0 cites·8 claims
- 4342US12538388B2Ceramic heater and manufacturing method thereofMICO CERAM LTD·Filed 2020·Granted Jan 27, 2026·0 cites·9 claims
- 4438US12176238B1Cryogenic susceptor and electric connector assembly used thereinMICO CERAM LTD·Filed 2021·Granted Dec 24, 2024·0 cites·14 claims
- 4538US11309206B2Electro static chuckMICO CERAM LTD·Filed 2020·Granted Apr 19, 2022·0 cites·12 claims
- 4632US2022369428A1Ceramic heater and manufacturing method thereforMICO CERAM LTD·Filed 2020·Application pending·0 cites
- 4730US2025226257A1Susceptor For High Temperature Semiconductor ProcessMICO CERAM LTD·Filed 2025·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →