Assignee
MICRO CONTROLE SPECTRA PHYSICS
FR·5 granted patents·1 pending application·6 citations·filing 2013–2023
Top patents by PatentIndex Score
6 records- 0179US10830582B2Method and system for compensating for accuracy errors of a hexapodMICRO CONTROLE SPECTRA PHYSICS·Filed 2016·Granted Nov 10, 2020·4 cites·9 claims
- 0273US12149186B2Piezoelectric inertia actuatorMICRO CONTROLE—SPECTRA PHYSICS·Filed 2023·Granted Nov 19, 2024·0 cites·15 claims
- 0362US10001194B2Device for driving in rotation a toothed wheel, in particular a turntableMICRO CONTROLE—SPECTRA PHYSICS·Filed 2014·Granted Jun 19, 2018·2 cites·8 claims
- 0460US11711031B2Piezoelectric inertia actuatorMICRO CONTROLE—SPECTRA PHYSICS·Filed 2020·Granted Jul 25, 2023·0 cites·18 claims
- 0539US2015013175A1Device and system for aligning beams and holding them in positionMICRO CONTROLE SPECTRA PHYSICS·Filed 2013·Application pending·0 cites
- 0634US11428524B2Method and device for generating a pulsed signal at particular positions of a moving elementMICRO CONTROLE SPECTRA PHYSICS·Filed 2018·Granted Aug 30, 2022·0 cites·10 claims
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