Assignee
MICRO LITHOGRAPHY INC
US·12 granted patents·311 citations·filing 1983–2013
Top patents by PatentIndex Score
12 records- 0192US4470508ADustfree packaging container and methodMICRO LITHOGRAPHY INC·Filed 1983·Granted Sep 11, 1984·90 cites·19 claims
- 0284US8968971B2Pellicles with reduced particulatesMICRO LITHOGRAPHY INC·Filed 2013·Granted Mar 3, 2015·4 cites·13 claims
- 0384US6566021B2Fluoropolymer-coated photomasks for photolithographyMICRO LITHOGRAPHY INC·Filed 2001·Granted May 20, 2003·27 cites·22 claims
- 0480US6594073B2Antistatic optical pellicleMICRO LITHOGRAPHY INC·Filed 2001·Granted Jul 15, 2003·20 cites·33 claims
- 0578US5453816AProtective mask for pellicleMICRO LITHOGRAPHY INC·Filed 1994·Granted Sep 26, 1995·33 cites·8 claims
- 0673US6573980B2Removable optical pellicleMICRO LITHOGRAPHY INC·Filed 2001·Granted Jun 3, 2003·13 cites·34 claims
- 0766US5576125AMethod for making an optical pellicleMICRO LITHOGRAPHY INC·Filed 1995·Granted Nov 19, 1996·29 cites·20 claims
- 0864US5820950AOptical pellicle and packageMICRO LITHOGRAPHY INC·Filed 1996·Granted Oct 13, 1998·24 cites·5 claims
- 0964US5772817AOptical pellicle mounting systemMICRO LITHOGRAPHY INC·Filed 1997·Granted Jun 30, 1998·27 cites·18 claims
- 1062US6190743B1Photomask protection systemMICRO LITHOGRAPHY INC·Filed 1998·Granted Feb 20, 2001·23 cites·11 claims
- 1152US6841317B2Vent for an optical pellicle systemMICRO LITHOGRAPHY INC·Filed 2002·Granted Jan 11, 2005·8 cites·16 claims
- 1249US5769984AOptical pellicle adhesion systemMICRO LITHOGRAPHY INC·Filed 1997·Granted Jun 23, 1998·13 cites·26 claims
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