Assignee
MICROBEAM INC
US·5 granted patents·261 citations·filing 1987–1989
Top patents by PatentIndex Score
5 records- 0192US4818872AIntegrated charge neutralization and imaging systemMICROBEAM INC·Filed 1987·Granted Apr 4, 1989·69 cites·22 claims
- 0291US5035787AMethod for repairing semiconductor masks and reticlesMICROBEAM INC·Filed 1989·Granted Jul 30, 1991·74 cites·4 claims
- 0391US4789787AWien filter designMICROBEAM INC·Filed 1987·Granted Dec 6, 1988·46 cites·15 claims
- 0487US4929839AFocused ion beam columnMICROBEAM INC·Filed 1988·Granted May 29, 1990·41 cites·2 claims
- 0575US5165954AMethod for repairing semiconductor masks & reticlesMICROBEAM INC·Filed 1989·Granted Nov 24, 1992·31 cites·2 claims
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