Assignee
MICROSI INC
US·9 granted patents·580 citations·filing 1987–1994
Top patents by PatentIndex Score
9 records- 0198US5310619AResist compositions comprising a phenolic resin, an acid forming onium salt and a tert-butyl ester or tert-butyl carbonate which is acid-cleavableMICROSI INC·Filed 1992·Granted May 10, 1994·177 cites·12 claims
- 0297US5108874AComposite useful in photolithographyMICROSI INC·Filed 1989·Granted Apr 28, 1992·83 cites·8 claims
- 0391US5002993AContrast enhancement layer compositions, alkylnitrones, and useMICROSI INC·Filed 1989·Granted Mar 26, 1991·70 cites·8 claims
- 0489US5106723AContrast enhancement layer compositions, alkylnitrones, and useMICROSI INC·Filed 1991·Granted Apr 21, 1992·75 cites·7 claims
- 0586US5196295ASpin castable mixtures useful for making deep-UV contrast enhancement layersMICROSI INC·Filed 1991·Granted Mar 23, 1993·70 cites·9 claims
- 0680US5362607AMethod for making a patterned resist substrate compositeMICROSI INC·Filed 1994·Granted Nov 8, 1994·36 cites·8 claims
- 0779US4990665ADiarylnitronesMICROSI INC·Filed 1989·Granted Feb 5, 1991·26 cites·1 claims
- 0876US4931380APre-exposure method for increased sensitivity in high contrast resist development of positive working diazo ketone photoresistMICROSI INC·Filed 1988·Granted Jun 5, 1990·29 cites·7 claims
- 0955US4968757ASoluble silicone-imide copolymersMICROSI INC·Filed 1987·Granted Nov 6, 1990·14 cites·12 claims
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