Assignee
MICROTHERM LLC
US·2 granted patents·238 citations·filing 1998–2000
Top patents by PatentIndex Score
2 records- 0194US5909276AOptical inspection module and method for detecting particles and defects on substrates in integrated process toolsMICROTHERM LLC·Filed 1998·Granted Jun 1, 1999·210 cites·40 claims
- 0263US6409090B1Self-optimizing device for controlling a heating systemMICROTHERM LLC·Filed 2000·Granted Jun 25, 2002·28 cites·24 claims
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