Assignee
MIKHAYLICHENKO KATRINA
US·5 granted patents·1 pending application·16 citations·filing 2004–2010
Top patents by PatentIndex Score
6 records- 0176US8440573B2Method and apparatus for pattern collapse free wet processing of semiconductor devicesMIKHAYLICHENKO KATRINA·Filed 2010·Granted May 14, 2013·4 cites·20 claims
- 0270US8062471B2Proximity head heating method and apparatusMIKHAYLICHENKO KATRINA·Filed 2004·Granted Nov 22, 2011·11 cites·12 claims
- 0355US8324114B2Method and apparatus for silicon oxide residue removalMIKHAYLICHENKO KATRINA·Filed 2010·Granted Dec 4, 2012·1 cites·18 claims
- 0452US8652266B2Method and apparatus for surface treatment of semiconductor substrates using sequential chemical applicationsMIKHAYLICHENKO KATRINA·Filed 2008·Granted Feb 18, 2014·0 cites·11 claims
- 0548US8102014B2Proximity head heating method and apparatusMIKHAYLICHENKO KATRINA·Filed 2010·Granted Jan 24, 2012·0 cites·17 claims
- 0633US2011139183A1System and method of preventing pattern collapse using low surface tension fluidMIKHAYLICHENKO KATRINA·Filed 2010·Application pending·0 cites
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