Assignee

MILLISENSOR SYSTEMS AND ACTUAT

US·1 granted patent·57 citations·filing 2000–2000

Technology mixG01C1

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0179US6626039B1Electrically decoupled silicon gyroscopeMILLISENSOR SYSTEMS AND ACTUAT·Filed 2000·Granted Sep 30, 2003·57 cites·54 claims

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