Assignee
MIMASU SEMICONDUCTOR IND CO LTD
JP·3 granted patents·0 citations·filing 2017–2017
Top patents by PatentIndex Score
3 records- 0145US10679862B2Contactless electric power supply mechanism and method for rotary table, and wafer rotating and holding deviceMIMASU SEMICONDUCTOR IND CO LTD·Filed 2017·Granted Jun 9, 2020·0 cites·13 claims
- 0240US11056362B2Wafer heating and holding mechanism and method for rotary table, and wafer rotating and holding deviceMIMASU SEMICONDUCTOR IND CO LTD·Filed 2017·Granted Jul 6, 2021·0 cites·15 claims
- 0332US10818538B2Wafer holding mechanism for rotary table and method and wafer rotating and holding deviceMIMASU SEMICONDUCTOR IND CO LTD·Filed 2017·Granted Oct 27, 2020·0 cites·3 claims
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