Assignee
MIMOTOGI AKIKO
JP·3 granted patents·2 pending applications·4 citations·filing 2008–2012
Technology mixG03F5
Top patents by PatentIndex Score
5 records- 0174US8883373B2Method for manufacturing photo mask, method for manufacturing semiconductor device, and programMIMOTOGI AKIKO·Filed 2012·Granted Nov 11, 2014·2 cites·12 claims
- 0265US8081294B2Method of evaluating optical beam source of exposure device, method of designing illumination shape of exposure device, and software for optimizing illumination shape of exposure deviceMIMOTOGI AKIKO·Filed 2008·Granted Dec 20, 2011·2 cites·19 claims
- 0348US8230369B2Simulation method and simulation programMIMOTOGI AKIKO·Filed 2009·Granted Jul 24, 2012·0 cites·9 claims
- 0436US2012068372A1Nanoimprint template and pattern transcription apparatusMIMOTOGI AKIKO·Filed 2011·Application pending·0 cites
- 0528US2010304279A1Manufacturing method of phase shift mask, creating method of mask data of phase shift mask, and manufacturing method of semiconductor deviceMIMOTOGI AKIKO·Filed 2010·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →