Assignee
MINEGISHI SHIN-YA
JP·4 granted patents·19 citations·filing 2011–2012
Top patents by PatentIndex Score
4 records- 0191US8513133B2Composition for forming resist underlayer film and method for forming patternMINEGISHI SHIN-YA·Filed 2011·Granted Aug 20, 2013·9 cites·4 claims
- 0287US8715916B2Pattern forming method and resist underlayer film-forming compositionMINEGISHI SHIN-YA·Filed 2012·Granted May 6, 2014·8 cites·7 claims
- 0370US9040232B2Method for pattern formation, method and composition for resist underlayer film formation, and resist underlayer filmMINEGISHI SHIN-YA·Filed 2011·Granted May 26, 2015·2 cites·9 claims
- 0439US9029069B2Resist underlayer film-forming composition and method for forming patternMINEGISHI SHIN-YA·Filed 2012·Granted May 12, 2015·0 cites·7 claims
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