Assignee
MIZUKAMI TATSUHIRO
JP·3 granted patents·103 citations·filing 2008–2008
Top patents by PatentIndex Score
3 records- 0195US8668836B2Plasma processing device and method of monitoring plasma discharge state in plasma processing deviceMIZUKAMI TATSUHIRO·Filed 2008·Granted Mar 11, 2014·99 cites·1 claims
- 0270US8585862B2Plasma processing device and plasma discharge state monitoring deviceMIZUKAMI TATSUHIRO·Filed 2008·Granted Nov 19, 2013·4 cites·9 claims
- 0349US8956499B2Plasma processing deviceMIZUKAMI TATSUHIRO·Filed 2008·Granted Feb 17, 2015·0 cites·5 claims
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