Assignee
MIZUSAWA KENETSU
JP·4 granted patents·23 citations·filing 2009–2012
Top patents by PatentIndex Score
4 records- 0187US8236380B2Gas supply system, substrate processing apparatus and gas supply methodMIZUSAWA KENETSU·Filed 2009·Granted Aug 7, 2012·9 cites·8 claims
- 0282US8221638B2Gas supply system, substrate processing apparatus and gas supply methodMIZUSAWA KENETSU·Filed 2009·Granted Jul 17, 2012·4 cites·14 claims
- 0378US8701593B2Gas supply system, substrate processing apparatus and gas supply methodMIZUSAWA KENETSU·Filed 2012·Granted Apr 22, 2014·5 cites·12 claims
- 0477US8906193B2Gas supply unit, substrate processing apparatus and supply gas setting methodMIZUSAWA KENETSU·Filed 2009·Granted Dec 9, 2014·5 cites·4 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →