Assignee
MKS INSTR INC
US·442 granted patents·60 pending applications·10,319 citations·filing 1975–2025
Top patents by PatentIndex Score
502 records- 0199US8781415B1Distortion correction based feedforward control systems and methods for radio frequency power sourcesMKS INSTR INC·Filed 2013·Granted Jul 15, 2014·103 cites·22 claims
- 0299US7151976B2Multivariate control of semiconductor processesMKS INSTR INC·Filed 2005·Granted Dec 19, 2006·97 cites·11 claims
- 0398US9947514B2Plasma RF bias cancellation systemMKS INSTR INC·Filed 2016·Granted Apr 17, 2018·42 cites·33 claims
- 0498US7764140B2Radio frequency power delivery systemMKS INSTR INC·Filed 2006·Granted Jul 27, 2010·139 cites·28 claims
- 0598US7755300B2Method and apparatus for preventing instabilities in radio-frequency plasma processingMKS INSTR INC·Filed 2006·Granted Jul 13, 2010·77 cites·11 claims
- 0698US7602127B2Phase and frequency control of a radio frequency generator from an external sourceMKS INSTR INC·Filed 2005·Granted Oct 13, 2009·130 cites·11 claims
- 0798US6712084B2Apparatus and method for pressure fluctuation insensitive mass flow controlMKS INSTR INC·Filed 2002·Granted Mar 30, 2004·113 cites·25 claims
- 0897US11946823B2Thermal conductivity gaugeMKS INSTR INC·Filed 2023·Granted Apr 2, 2024·3 cites·6 claims
- 0997US11935726B2High speed synchronization of plasma source/bias power deliveryMKS INSTR INC·Filed 2021·Granted Mar 19, 2024·6 cites·31 claims
- 1097US11808643B2Thermal conductivity pressure gauge with heated chamber wallMKS INSTR INC·Filed 2021·Granted Nov 7, 2023·4 cites·34 claims
- 1197US11656139B2Thermal conductivity gaugeMKS INSTR INC·Filed 2020·Granted May 23, 2023·4 cites·24 claims
- 1297US11527384B2Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbancesMKS INSTR INC·Filed 2020·Granted Dec 13, 2022·4 cites·30 claims
- 1397US11315757B2Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in RF powered plasma applicationsMKS INSTR INC·Filed 2020·Granted Apr 26, 2022·7 cites·39 claims
- 1497US10304669B1Adaptive counter measure control thwarting IMD jamming impairments for RF plasma systemsMKS INSTR INC·Filed 2018·Granted May 28, 2019·56 cites·35 claims
- 1597US10049857B2Adaptive periodic waveform controllerMKS INSTR INC·Filed 2015·Granted Aug 14, 2018·47 cites·28 claims
- 1697US7891228B2Dual-mode mass flow verification and mass flow delivery system and methodMKS INSTR INC·Filed 2008·Granted Feb 22, 2011·56 cites·14 claims
- 1797US7809473B2Apparatus and method for pressure fluctuation insensitive mass flow controlMKS INSTR INC·Filed 2007·Granted Oct 5, 2010·46 cites·21 claims
- 1897US7474968B2Critical flow based mass flow verifierMKS INSTR INC·Filed 2006·Granted Jan 6, 2009·59 cites·14 claims
- 1996US11536755B2System and method for arc detection using a bias RF generator signalMKS INSTR INC·Filed 2020·Granted Dec 27, 2022·13 cites·24 claims
- 2096US10741363B1Extremum seeking control apparatus and method for automatic frequency tuning for RF impedance matchingMKS INSTR INC·Filed 2019·Granted Aug 11, 2020·38 cites·26 claims
- 2196US10546724B2Pulsed, bidirectional radio frequency source/loadMKS INSTR INC·Filed 2018·Granted Jan 28, 2020·40 cites·47 claims
- 2296US10031005B2Method and apparatus for self verification of pressure-based mass flow controllersMKS INSTR INC·Filed 2012·Granted Jul 24, 2018·20 cites·14 claims
- 2396US8912835B2Method and system for controlling radio frequency powerMKS INSTR INC·Filed 2014·Granted Dec 16, 2014·65 cites·10 claims
- 2496US8581597B2Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc eventsMKS INSTR INC·Filed 2012·Granted Nov 12, 2013·15 cites·24 claims
- 2596US8344801B2Variable class characteristic amplifierMKS INSTR INC·Filed 2010·Granted Jan 1, 2013·64 cites·46 claims
- 2696US7728602B2Harmonic derived arc detectorMKS INSTR INC·Filed 2007·Granted Jun 1, 2010·102 cites·33 claims
- 2796US7679026B1Multi-frequency static neutralization of moving charged objectsMKS INSTR INC·Filed 2007·Granted Mar 16, 2010·24 cites·20 claims
- 2896US7122965B2Methods and apparatus for calibration and metrology for an integrated RF generator systemMKS INSTR INC·Filed 2004·Granted Oct 17, 2006·117 cites·24 claims
- 2996US6409149B1Dual pendulum valve assembly with valve seat coverMKS INSTR INC·Filed 2000·Granted Jun 25, 2002·69 cites·19 claims
- 3096US5965821APressure sensorMKS INSTR INC·Filed 1997·Granted Oct 12, 1999·137 cites·18 claims
- 3195US11996274B2Real-time, non-invasive IEDF plasma sensorMKS INSTR INC·Filed 2022·Granted May 28, 2024·3 cites·39 claims
- 3295US11996269B2Extremum seeking control apparatuses with online parameter adjustment and methodsMKS INSTR INC·Filed 2022·Granted May 28, 2024·2 cites·60 claims
- 3395US11232931B2Intermodulation distortion mitigation using electronic variable capacitorMKS INSTR INC·Filed 2020·Granted Jan 25, 2022·10 cites·23 claims
- 3495US11222770B2Microwave applicator with solid-state generator power sourceMKS INSTR INC·Filed 2020·Granted Jan 11, 2022·10 cites·10 claims
- 3595US10229816B2Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning networkMKS INSTR INC·Filed 2016·Granted Mar 12, 2019·17 cites·43 claims
- 3695US8952765B2System and methods of bimodal automatic power and frequency tuning of RF generatorsMKS INSTR INC·Filed 2013·Granted Feb 10, 2015·40 cites·20 claims
- 3795US7615120B2Pulsed mass flow delivery system and methodMKS INSTR INC·Filed 2006·Granted Nov 10, 2009·64 cites·15 claims
- 3895US7461549B1Mass flow verifiers capable of providing different volumes, and related methodsMKS INSTR INC·Filed 2007·Granted Dec 9, 2008·37 cites·18 claims
- 3995US7424346B2Apparatus and method for pressure fluctuation insensitive mass flow controlMKS INSTR INC·Filed 2005·Granted Sep 9, 2008·35 cites·21 claims
- 4095US7353771B2Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generatorMKS INSTR INC·Filed 2005·Granted Apr 8, 2008·44 cites·22 claims
- 4195US7174263B2External volume insensitive flow verificationMKS INSTR INC·Filed 2005·Granted Feb 6, 2007·35 cites·20 claims
- 4295US7161112B2Toroidal low-field reactive gas sourceMKS INSTR INC·Filed 2003·Granted Jan 9, 2007·45 cites·11 claims
- 4395US6568274B1Capacitive based pressure sensor designMKS INSTR INC·Filed 2000·Granted May 27, 2003·104 cites·29 claims
- 4495US6161576AIntegrated turbo pump and control valve systemMKS INSTR INC·Filed 1999·Granted Dec 19, 2000·184 cites·9 claims
- 4595US6089537APendulum valve assemblyMKS INSTR INC·Filed 1999·Granted Jul 18, 2000·216 cites·5 claims
- 4695US5868159APressure-based mass flow controllerMKS INSTR INC·Filed 1996·Granted Feb 9, 1999·228 cites·15 claims
- 4795US5827370AMethod and apparatus for reducing build-up of material on inner surface of tube downstream from a reaction furnaceMKS INSTR INC·Filed 1997·Granted Oct 27, 1998·138 cites·76 claims
- 4894US11531312B2Adaptive control for a power generatorMKS INSTR INC·Filed 2021·Granted Dec 20, 2022·5 cites·16 claims
- 4994US11533805B2Cooling and compression clamp for short lead power devicesMKS INSTR INC·Filed 2021·Granted Dec 20, 2022·5 cites·6 claims
- 5094US11158488B2High speed synchronization of plasma source/bias power deliveryMKS INSTR INC·Filed 2019·Granted Oct 26, 2021·13 cites·36 claims
Showing the top 50 of 502 patent records by PatentIndex Score.
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