Assignee

MOHN JONATHAN D

US·2 granted patents·41 citations·filing 2011–2012

Technology mixC23C2 H01J1 H01L1 H10P1 Y10T1

Top patents by PatentIndex Score

2 records

0193US9719169B2System and apparatus for flowable deposition in semiconductor fabricationMOHN JONATHAN D·Filed 2011·Granted Aug 1, 2017·31 cites·18 claims
0287US9121097B2Variable showerhead flow by varying internal baffle conductanceMOHN JONATHAN D·Filed 2012·Granted Sep 1, 2015·10 cites·23 claims

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