Assignee
MOMENTUM TECHNICAL CONSULTING
US·2 granted patents·27 citations·filing 2000–2001
Technology mixB24B2
Top patents by PatentIndex Score
2 records- 0170US6547637B1Chemical/mechanical polishing endpoint detection device and methodMOMENTUM TECHNICAL CONSULTING·Filed 2000·Granted Apr 15, 2003·18 cites·15 claims
- 0256US6572441B2Method of and apparatus for chemical-mechanical polishingMOMENTUM TECHNICAL CONSULTING·Filed 2001·Granted Jun 3, 2003·9 cites·33 claims
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