Assignee
MONKOWSKI JOSEPH R
7 granted patents·87 citations·filing 1980–2012
Top patents by PatentIndex Score
7 records- 0194US8240324B2Method and apparatus for in situ testing of gas flow controllersMONKOWSKI JOSEPH R·Filed 2009·Granted Aug 14, 2012·29 cites·14 claims
- 0293US9400004B2Transient measurements of mass flow controllersMONKOWSKI JOSEPH R·Filed 2011·Granted Jul 26, 2016·16 cites·8 claims
- 0389US8857456B2Method and apparatus for in situ testing of gas flow controllersMONKOWSKI JOSEPH R·Filed 2012·Granted Oct 14, 2014·12 cites·21 claims
- 0489US8237928B2Method and apparatus for identifying the chemical composition of a gasMONKOWSKI JOSEPH R·Filed 2011·Granted Aug 7, 2012·7 cites·10 claims
- 0588US8667830B2Method and apparatus for in situ testing of gas flow controllersMONKOWSKI JOSEPH R·Filed 2010·Granted Mar 11, 2014·9 cites·15 claims
- 0686US8393197B2Method and apparatus for the measurement of atmospheric leaks in the presence of chamber outgassingMONKOWSKI JOSEPH R·Filed 2009·Granted Mar 12, 2013·12 cites·20 claims
- 0736US4415545ASolid film growth via preferential etching of liquid solutionsMONKOWSKI JOSEPH R·Filed 1980·Granted Nov 15, 1983·2 cites·44 claims
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