Assignee
MOOHAN CO LTD
US·4 granted patents·2 pending applications·699 citations·filing 2000–2016
Top patents by PatentIndex Score
6 records- 0194US6656282B2Atomic layer deposition apparatus and process using remote plasmaMOOHAN CO LTD·Filed 2001·Granted Dec 2, 2003·408 cites·15 claims
- 0293US7435445B2Method for manufacturing semiconductor deviceMOOHAN CO LTD·Filed 2006·Granted Oct 14, 2008·39 cites·7 claims
- 0392US6306216B1Apparatus for deposition of thin films on wafers through atomic layer epitaxial processMOOHAN CO LTD·Filed 2000·Granted Oct 23, 2001·251 cites·9 claims
- 0472US11075060B2Substrate processing apparatusMOOHAN CO LTD·Filed 2013·Granted Jul 27, 2021·1 cites·20 claims
- 0536US2018254365A1Thin film type solar cell and method for manufacturing the sameMOOHAN CO LTD·Filed 2016·Application pending·0 cites
- 0634US2018033903A1Structure using a thin film type solar cellMOOHAN CO LTD·Filed 2015·Application pending·0 cites
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