Assignee
MOORE EPITAXIAL INC
US·28 granted patents·2,803 citations·filing 1989–2005
Top patents by PatentIndex Score
28 records- 0199US5820686AMulti-layer susceptor for rapid thermal process reactorsMOORE EPITAXIAL INC·Filed 1996·Granted Oct 13, 1998·486 cites·13 claims
- 0299US5444217ARapid thermal processing apparatus for processing semiconductor wafersMOORE EPITAXIAL INC·Filed 1993·Granted Aug 22, 1995·678 cites·73 claims
- 0399US5053247AMethod for increasing the batch size of a barrel epitaxial reactor and reactor produced therebyMOORE EPITAXIAL INC·Filed 1989·Granted Oct 1, 1991·486 cites·23 claims
- 0496US6310327B1Rapid thermal processing apparatus for processing semiconductor wafersMOORE EPITAXIAL INC·Filed 2000·Granted Oct 30, 2001·82 cites·29 claims
- 0596US5683518ARapid thermal processing apparatus for processing semiconductor wafersMOORE EPITAXIAL INC·Filed 1994·Granted Nov 4, 1997·209 cites·51 claims
- 0695US5710407ARapid thermal processing apparatus for processing semiconductor wafersMOORE EPITAXIAL INC·Filed 1995·Granted Jan 20, 1998·140 cites·6 claims
- 0792US6347749B1Semiconductor processing reactor controllable gas jet assemblyMOORE EPITAXIAL INC·Filed 2000·Granted Feb 19, 2002·40 cites·33 claims
- 0891US6328221B1Method for controlling a gas injector in a semiconductor processing reactorMOORE EPITAXIAL INC·Filed 2000·Granted Dec 11, 2001·43 cites·26 claims
- 0988US5580388AMulti-layer susceptor for rapid thermal process reactorsMOORE EPITAXIAL INC·Filed 1995·Granted Dec 3, 1996·92 cites·23 claims
- 1087US7794667B2Gas ring and method of processing substratesMOORE EPITAXIAL INC·Filed 2005·Granted Sep 14, 2010·12 cites·36 claims
- 1184US6773749B1Method of controlling gas flow to a semiconductor processing reactorMOORE EPITAXIAL INC·Filed 2001·Granted Aug 10, 2004·22 cites·20 claims
- 1284US6592675B2Rotating susceptorMOORE EPITAXIAL INC·Filed 2001·Granted Jul 15, 2003·26 cites·27 claims
- 1384US5872632ACluster tool layer thickness measurement apparatusMOORE EPITAXIAL INC·Filed 1996·Granted Feb 16, 1999·57 cites·11 claims
- 1482US5207835AHigh capacity epitaxial reactorMOORE EPITAXIAL INC·Filed 1990·Granted May 4, 1993·51 cites·42 claims
- 1581US6110289ARapid thermal processing barrel reactor for processing substratesMOORE EPITAXIAL INC·Filed 1997·Granted Aug 29, 2000·39 cites·27 claims
- 1680US5240024AAutomated process gas supply system for evacuating a process lineMOORE EPITAXIAL INC·Filed 1992·Granted Aug 31, 1993·40 cites·17 claims
- 1779US6491435B1Linear robotMOORE EPITAXIAL INC·Filed 2000·Granted Dec 10, 2002·26 cites·26 claims
- 1879US6213478B1Holding mechanism for a susceptor in a substrate processing reactorMOORE EPITAXIAL INC·Filed 1999·Granted Apr 10, 2001·53 cites·20 claims
- 1975US6799603B1Gas flow controller systemMOORE EPITAXIAL INC·Filed 1999·Granted Oct 5, 2004·33 cites·6 claims
- 2075US5601107AAutomated process gas supply system for evacuating a process lineMOORE EPITAXIAL INC·Filed 1995·Granted Feb 11, 1997·35 cites·7 claims
- 2168US5802099AMethod for measuring substrate temperature in radiant heated reactorsMOORE EPITAXIAL INC·Filed 1996·Granted Sep 1, 1998·36 cites·30 claims
- 2262US6443618B1Particulate free air bearing and sealMOORE EPITAXIAL INC·Filed 2000·Granted Sep 3, 2002·19 cites·20 claims
- 2360US5801961APower management system for a semiconductor processing facilityMOORE EPITAXIAL INC·Filed 1996·Granted Sep 1, 1998·26 cites·10 claims
- 2457US6475284B1Gas dispersion headMOORE EPITAXIAL INC·Filed 1999·Granted Nov 5, 2002·18 cites·41 claims
- 2553US6169244B1Thermocouple sheath coverMOORE EPITAXIAL INC·Filed 1999·Granted Jan 2, 2001·22 cites·28 claims
- 2649US6428609B1Exhaust particulate controller and methodMOORE EPITAXIAL INC·Filed 2000·Granted Aug 6, 2002·8 cites·16 claims
- 2749US6163015ASubstrate support elementMOORE EPITAXIAL INC·Filed 1999·Granted Dec 19, 2000·14 cites·8 claims
- 2847US5417236AAutomated process gas supply system for evacuating a process lineMOORE EPITAXIAL INC·Filed 1993·Granted May 23, 1995·10 cites·7 claims
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