Assignee
MORIKAWA YASUHIRO
JP·2 granted patents·4 pending applications·2 citations·filing 2007–2010
Top patents by PatentIndex Score
6 records- 0161US8153926B2Etching method and systemMORIKAWA YASUHIRO·Filed 2010·Granted Apr 10, 2012·1 cites·11 claims
- 0258US8993449B2Etching methodMORIKAWA YASUHIRO·Filed 2010·Granted Mar 31, 2015·1 cites·11 claims
- 0345US2012186746A1Plasma etching apparatusMORIKAWA YASUHIRO·Filed 2010·Application pending·0 cites
- 0443US2010133235A1Dry etching apparatus and dry etching methodMORIKAWA YASUHIRO·Filed 2008·Application pending·0 cites
- 0541US2010219158A1Method for dry etching interlayer insulating filmMORIKAWA YASUHIRO·Filed 2007·Application pending·0 cites
- 0639US2010133233A1Dry etching methodMORIKAWA YASUHIRO·Filed 2008·Application pending·0 cites
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